4-DOF SOI-MEMS ultrasonic energy harvester
- Creator: Fowler, Anthony G. , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2016
A 4-DOF MEMS energy harvester using ultrasonic excitation
- Creator: Fowler, Anthony G. , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2016